Micro Fluidic And Micro Electromechanical System Applications Subtractive Processing Of Glass Substrates (Nguyen Van Toa

[Farid-Khan]

9781032747798 Nguyen Van Toan;Tarlochan Singh; CRC Press 2026

Catergory: Technology, Engineering, Nonfiction

The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications.
This book:
✔Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications.
✔Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods.
✔Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications.
✔Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass.
✔Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channels.
It is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering.

Contents of Download:

? Micro Fluidic And Micro Electromechanical System Applications.pdf (Nguyen Van Toan;Tarlochan Singh (2026) (25.8 MB)

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